United States · Who invested in Therma-Wave?
Therma-Wave's investors include Deephaven Capital Management and North Run Capital Partners.
United States · Venture startup
Who invested in Therma-Wave
One round we have observed, with the 2 investors named in it. Every figure came from a named source, and where the company reported a raise to the SEC itself, that is shown beside it.
Funding summaryUpdated 26 Oct 2026
$10Mraised across 1 round since 2005, from 1 source
- Latest round
- Venture, $10MNov 2005
- Investors
- 2
The rounds
- Nov 2005
Quick answers about Therma-Wave
How much has Therma-Wave raised?
Therma-Wave has raised $10M across 1 round since 2005.
When did Therma-Wave last raise?
Therma-Wave's most recent round was a Venture of $10M in Nov 2005.
What was Therma-Wave's biggest round?
Its most recent round, $10M in Nov 2005, is also its largest on record.
Who backed Therma-Wave first?
Therma-Wave's first round on record, in Nov 2005, was backed by Deephaven Capital Management and North Run Capital Partners.
What stage is Therma-Wave at?
Therma-Wave's latest named round is a Venture, in Nov 2005.
Where is Therma-Wave based?
Therma-Wave is based in the United States.
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In the same sector, and raised in the last eighteen months.
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